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Plasma Module

Plasma Module

Low temperature plasmas represent the amalgamation of fluid mechanics, reaction engineering, physical kinetics, heat transfer, mass transfer, and electromagnetics. The Plasma Module is a specialized tool for modeling non-equilibrium discharges that occur in a wide range of engineering disciplines. There are specialized modeling interfaces for the most common types of plasma reactors including inductively coupled plasmas (ICP), DC discharges, wave heated discharges (microwave plasmas), and capacitively coupled plasmas (CCP). Modeling the interaction between the plasma and an external circuit is an important part of understanding the overall characteristics of a discharge.

The Plasma Module provides tools to add circuit elements directly to a 1D, 2D, or 3D model, or to import an existing SPICE netlist into the model. The plasma chemistry is specified either by loading in sets of collision cross sections from a file, or by adding reactions and species to the Model Builder. The complicated coupling between the different physics that constitute a plasma is automatically handled by the physics interfaces.

The Plasma Module is designed for researchers, engineers, and experimentalists in the field of plasma science. The Module is accompanied by a suite of tutorial and industrially relevant models, which serve as both instructional examples and a foundation for future work.


Application Area

  • Capacitively coupled plasmas (CCP)
  • CVD and PECVD
  • DC discharges
  • Dielectric barrier discharges
  • ECR sources
  • Etching
  • Hazardous gas destruction
  • Inductively coupled plasmas (ICP)
  • Ion sources
  • Materials processing
  • Microwave plasmas
  • Ozone generation
  • Plasma chemistry
  • Plasma display panels
  • Plasma sources
  • Power systems
  • Semiconductor processing
  • Thrusters
Product Information

User Stories:


iMath Asia
i-Math was incorporated in 2001 as an organization dedicated to delivering innovative high precision mathematical and control software solutions to the Educational, R&D, Engineering and Manufacturing industries in the ASEAN Region.

We offer unique and pioneeing 'state of the art' hardware and software solutions for business and educational needs.
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